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SPD Sub-Pixel Detector
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High Precision Inspection |
High Resolution Area Scan CCD; Resolution ≧ 30 µm |
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Universal Size |
Cell 3” ~ 15.4” |
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Damage Inspection |
Obstacles, Scratch, abnormal White/ Black Particle, White/ Black Dot, Point Mura, Side Mura, Bubbles, BM Dot |
By stimulating the pre-programmed process parameters to automatically
inspect the image quality and functions of Cell, and using a high speed
camera and high precision positioning mechanism,SPD can retrieve the
images and inspect any abnormal performance.
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