AOI  Auto Optic Inspection

Functions of Product Apply high resolution CCD with the hardware localizer to take photos and scan them back and forth through a high-speed image contrast method, and save the defect image in the user-defined format to compile information on the defects, in order to provide files for back-end equipment and operators.

Inner Stage Mechanical Specifications X/Y axis linear motor Z axis stepper motor Anti-shock platform with an air float system Stage of structural steel Granite platform

The Features of Products

▓Identifying defects (residual of photoresist, damage, dust, and contamination)

▓Viewing Defect Map

▓Judge Rules for OK/ NG products

▓Types of defects (Dark /Bright Defect)

▓Definitions of size defect (S, M, L)

▓Product specification and the demonstration of Recipe

▓Viewing the retrieved images

Examples of AOI

                  Scratch                               Circuit Defects                           Other Defects